SSL Seminar Series 2002 No.3
Title: Nanoscale chemical characterization using TOF-SIMS
and Laser SNMS
Speaker: Mr Liu Rong (SSL, Dept. of Physics,
Date: Feburary 28, 2002
Venue: Physics Resource Room (Blk S13 # 02-16)
For many applications detailed information on the chemical surface
composition with extremely high spatial resolution is essential.
Atomic Force Microscopy offers highest spatial resolution but does
not provide chemical information. However, the combination with
TOF-SIMS and Laser-SNMS, the most sensitive techniques for chemical
surface mapping with good lateral resolution, allows to determine
the surface chemistry of nanostructures. In addition, the Focused
ion beam (FIB) with a quadrupole SIMS and Nano-50 SIMS will be introduced.