SSL Seminar Series 2001 No. 7
Title: Fundamental Aspects of SIMS
Speaker: Prof HW Werner (Tech Univ Vienna, Austria)
Date: 20th March 2001
Time: 3:00 pm
Venue: Physics Conference Room S13, Mo1-15

Abstract
Prof Dr H W Werner will review the field of secondary ion mass spectrometry (SIMS) and his talk will cover the following topics:

1. University versus Industry: the place of analytical lab in industry
2. History and principle of SIMS
3. Secondary ion emission and SIMS instrumentation
4. Analytical aspects: SIMS equations; Quantitative analysis;Modes of analysis: Dynamic/Static SIMS
5. Role of SIMS in semiconductor technology
6. Trends in ULSI

He will further expand on the industrial applications of SIMS with a workshop entitled “Application of SIMS in Semiconductor R(esearch) , D(evelopment) and P(roduction)?"
on 21 March 2001 (Wed) 3 pm at IMRE.

About speaker
Prof Dr H W Werner obtained his Ph.D. at the university of Graz in 1958 and subsequently joined Philips Research Labs, with the task to develop a "technique which might be important for future semiconductor analysis". As an answer to this task, he invented the basic principle of SIMS in 1958 and further developed it in the subsequent years. He has about 20 patents in this field. In 1990 he was appointed (visiting, Honorary) Prof. for Industrial Semiconductor Analysis at the Technical University of Vienna. His main activity now is to convey his experience to the next generation, via lectures at Tech.Univ. in Vienna.

Prof Dr H W Werner was a co-founder of the International Steering Committee SIMS conferences (secretary, until now), European Conferences on Surface and Interface Analysis, ECASIA ( President until 1999) and European Microbeam Analysis Society, EMAS ( President until 1998). He has published about 100 articles (invited and contributed) in the field of instrumental analysis and has given invited lectures all over the world.