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SSL Seminar Series 2001 No. 16
Title: Ultra shallow SIMS depth profiling
Speaker: Mr Liu Rong (SSL, NUS)
Date: 4th October 2001
Time: 5:00-6:00pm
Venue: Physics Resource Room S13, 02-16
Abstract
Following the increasingly stringent requirements in the characterization
of sub-micron IC devices, a good understanding of the various factors
affecting ultra shallow depth profiling in secondary ion mass spectrometry
(SIMS) has become crucial. Achieving high depth resolution (of the
order of 1 nm) is critical in the semiconductor industry today, and
various methods have been developed to optimize depth resolution.
In this present, we will discuss ultra shallow SIMS depth profiling
using B and Ge delta-doped Si samples using low energy (e.g. 500 eV)
O2+ primary beams. The relationship between depth resolution of the
delta layers and surface topography measured by atomic force microscopy
(AFM) is studied. The effects of oxygen flooding and sample rotation,
used to suppress surface roughening is also investigated. The various
factors that limit the depth resolution in ultra shallow SIMS depth
profiling are discussed. |
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