Cameca IMS 6f  
  The IMS 6f, by Cameca (France), is an UHV system for secondary ion mass spectroscopic (SIMS) study. The system is equipped with a magnetic sector analyser, which has a superior maximum mass resolving power, m/Dm, of at least 25000 (10% definition). The system has a duoplasmatron source capable of producing O2+ or O- ions, and a microbeam source for producing Cs+ ions. Both sources offer premium beam stability, as well as ultra-fine minimum beam size (300nm for O2+ and 200nm for Cs+). The key capabilities of the system include low detection limit and high resolving power in depth profiling, ultra shallow depth profiling, 3D ion imaging, and excellent charge neutralisation.