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The IMS 6f, by Cameca (France), is an UHV system for secondary ion
mass spectroscopic (SIMS) study. The system is equipped with a magnetic
sector analyser, which has a superior maximum mass resolving power,
m/Dm, of at least 25000 (10% definition). The system has a duoplasmatron
source capable of producing O2+ or O- ions, and a microbeam source
for producing Cs+ ions. Both sources offer premium beam stability,
as well as ultra-fine minimum beam size (300nm for O2+ and 200nm for
Cs+). The key capabilities of the system include low detection limit
and high resolving power in depth profiling, ultra shallow depth profiling,
3D ion imaging, and excellent charge neutralisation. |
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